Nanoscale phase change memory with graphene ribbon electrodes

作者：Behnam Ashkan; Xiong Feng; Cappelli Andrea; Wang Ning C; Carrion Enrique A; Hong Sungduk; Dai Yuan; Lyons Austin S; Chow Edmond K; Piccinini Enrico; Jacoboni Carlo; Pop Eric^*

来源：Applied Physics Letters, 2015, 107(12): 123508.

DOI：10.1063/1.4931491

Phase change memory (PCM) devices are known to reduce in power consumption as the bit volume and contact area of their electrodes are scaled down. Here, we demonstrate two types of low-power PCM devices with lateral graphene ribbon electrodes: one in which the graphene is patterned into narrow nanoribbons and the other where the phase change material is patterned into nanoribbons. The sharp graphene "edge" contacts enable switching with threshold voltages as low as similar to 3V, low programming currents (< 1 mu A SET and < 10 mu A RESET) and OFF/ON resistance ratios > 100. Large-scale fabrication with graphene grown by chemical vapor deposition also enables the study of heterogeneous integration and that of variability for such nanomaterials and devices.

• 出版日期2015-9-21