科研之友
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摘要
This paper reports a technology to fabricate micro-parylene tubes with integrated sensors. The unique advantage of this new technology is its ability to incorporate high-temperature solid-state materials. Standard CMOS and MEMS devices can be fabricated first on the silicon wafers and then the smart tubes are formed by taking advantage of XeF2 isotropic silicon etching and conformal parylene coating.
- 出版日期2013
