A Numerical Simulation Study on the Effects of Crucible Rotation and Magnetic Fields in Growth of SiGe by the Traveling Heater Method

作者：Takagi Youhei^*; Okano Yasunori; Dost Sadik

来源：Journal of Heat Transfer-Transactions of the ASME, 2012, 134(1): 012301.

DOI：10.1115/1.4004803

• numerical simulation
• crystal growth
• traveling heater method
• crucible rotation
• static magnetic field

A numerical simulation study was carried out to shed light on the effects of applied crucible rotation and static magnetic field during the traveling heater method growth of bulk SiGe single crystals. The simulation results show that the application of crucible rotation weakens the radial silicon concentration gradient due to the effect of centrifugal force. The effects of applied static magnetic field direction and strength on the concentration field in the melt were also studied. It was found that the simultaneous application of crucible rotation and static magnetic field is best to grow large crystals with uniform composition. An optimum combination of crucible rotation rates and applied magnetic field strengths is determined. [DOI: 10.1115/1.4004803]

• 出版日期2012-1