Astigmatism error modification for absolute shape reconstruction using Fourier transform method

作者：He Yuhang^*; Li Qiang; Gao Bo; Liu Ang; Xu Kaiyuan; Wei Xiaohong; Chai Liqun

来源：Optics Communications, 2014, 332: 233-237.

DOI：10.1016/j.optcom.2014.07.022

• Zernike polynomial fitting
• Absolute test
• Fourier transform
• Error modification

A method is proposed to modify astigmatism errors in absolute shape reconstruction of optical plane using Fourier transform method. If a transmission and reflection flat are used in an absolute test, two translation measurements lead to obtain the absolute shapes by making use of the characteristic relationship between the differential and original shapes in spatial frequency domain. However, because the translation device cannot guarantee the test and reference flats rigidly parallel to each other after the translations, a tilt error exists in the obtained differential data, which caused power and astigmatism errors in the reconstructed shapes. In order to modify the astigmatism errors, a rotation measurement is added. Based on the rotation invariability of the form of Zernike polynomial in circular domain, the astigmatism terms are calculated by solving polynomial coefficient equations related to the rotation differential data, and subsequently the astigmatism terms including error are modified. Computer simulation proves the validity of the proposed method.

• 出版日期2014-12-1