Analysis of charged device model (CDM) ESD in MEMS

作者：Greason William D^*

来源：Journal of Electrostatics, 2010, 68(2): 159-167.

DOI：10.1016/j.elstat.2009.12.002

• Analysis
• CDM
• ESD
• MEMS

The effect of charge injection due to CDM ESD in capacitive MEMS structures is analyzed. The results show that as feature size is reduced, ESD injected charge produces a change for the stiction effect which is inversely proportional to the square of the plate area and a change in the dielectric layer breakdown which is inversely proportional to the plate area. An electric field model is developed to examine charge and voltage modes in MEMS. A charge injection test method is proposed to determine the susceptibility of MEMS to CDM ESD.

• 出版日期2010-4