Acid-catalyzed kinetics of indium tin oxide etching

作者：Choi Jae Hyeok; Kim Seong Oh; Hilton Diana L; Cho Nam Joon^*

来源：Thin Solid Films, 2014, 565: 179-185.

DOI：10.1016/j.tsf.2014.06.053

• Indium tin oxide
• Etching
• Quartz crystal microbalance
• Contact angle
• X-ray photoelectron spectroscopy
• Atomic force microscopy

We report the kinetic characterization of indium tin oxide (ITO) film etching by chemical treatment in acidic and basic electrolytes. It was observed that film etching increased under more acidic conditions, whereas basic conditions led to minimal etching on the time scale of the experiments. Quartz crystal microbalance was employed in order to track the reaction kinetics as a function of the concentration of hydrochloric acid and accordingly solution pH. Contact angle measurements and atomic force microscopy experiments determined that acid treatment increases surface hydrophilicity and porosity. X-ray photoelectron spectroscopy experiments identified that film etching is primarily caused by dissolution of indium species. A kinetic model was developed to explain the acid-catalyzed dissolution of ITO surfaces, and showed a logarithmic relationship between the rate of dissolution and the concentration of undisassociated hydrochloric acid molecules. Taken together, the findings presented in this work verify the acid-catalyzed kinetics of ITO film dissolution by chemical treatment, and support that the corresponding chemical reactions should be accounted for in ITO film processing applications.

• 出版日期2014-8-28