μ m-resolution thickness distribution measurement of transparent glass films by using a multi-wavelength phase-shift extraction method in the large lateral shearing interferometer

作者：Ren, Yugang; Cao, Zhang^*; Tang, Xiaoyang; Xie, Heng; Xu, Lijun

来源：Optics Express, 2019, 27(3): 2899-2914.

DOI：10.1364/OE.27.002899

• WAVE-FRONT RECONSTRUCTION
• LEAST-SQUARES
• TEMPERATURE
• MICROCHIP
• SYSTEM
• PLATES
• INDEX

In this paper, a precise phase-shift extraction method was introduced for the fust time to measure the thickness distribution of transparent glass films. A spatial light modulator modulated the phases of the incident laser in a large lateral shearing interferometer. The phase shifting caused by the thickness of the films can be extracted ranging from 0 to 2 pi in a recursive way suitable for real-time implementation. Incident lasers with different wavelengths were utilized to measure the spatial distribution of the thickness of the films, and they can be larger than one wavelength of the incident light. Both artificial and experimental results have verified that the resolution of the thickness measurement reaches up to 1 mu m.

• 出版日期2019-2-4
• 单位北京航空航天大学