A Nano-opto-mechanical pressure sensor

作者：Zhao X; Tsai J M; Cai H; Ji X M; Zhou J; Bao M H; Huang Y P; Kwang D L; Liu A Q^*

来源：2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011-06-05 to 2011-06-09.

DOI：10.1109/TRANSDUCERS.2011.5969721

• Acoustic pressure sensors
• MEMS pressure sensor
• Nano-opto-mechanical systems (NOMS)
• Optical force
• Output intensity
• ring resonator

A Nano-opto-mechanical pressure sensor using optical force is reported in this paper. The pressure sensor consists of a square diaphragm, a ring resonator and four waveguides. By applying a pressure ranging from 900 kPa to 990 kPa, the output intensity ratio sensitivity of 2.272 /kPa is achieved. Compared with traditional MEMS pressure sensor, the proposed ring pressure sensor has advantages such as higher sensitivity and resolution, which could be applied to acoustic pressure sensors and microphones etc.

• 出版日期2011
• 单位复旦大学