AlN-TiB2-TiSi2 coatings obtained by pulsed magnetron sputtering

作者：Beresnev V M^*; Torianyk I M; Sobol' O V; Pogrebnyak A D; Kropotov A Yu; Stervoedov N G; Nyemchenko U S; Kolesnikov D A; Klimenko S A; Turbin P V

来源：Technical Physics, 2014, 59(8): 1220-1223.

DOI：10.1134/S1063784214080052

AlN-TiB2 composite ceramic samples with a TiSi2 additive are obtained by magnetron sputtering. After deposition, ordered regions in the coatings measure 1 nm across, so that they can be categorized as amorphous-like. Annealing at 900 and 1300A degrees C causes crystallization with grain sizes of 11 and 25 nm, respectively. However, crystallization does not dramatically deteriorate the mechanical properties owing to the formation of high-enthalpy phases (AlB2 at 900A degrees C and AlB3 at 1300A degrees C). The hardness of the coatings varies from 15.1 GPa in the as-prepared samples to 11.0 GPa after annealing to 1300A degrees C. This makes it possible to improve the wear resistance of edge tools with these coatings by a factor of 1.32 at a temperature of 1300A degrees C near the contact.

• 出版日期2014-8