Generation of nitrogen beams with very high N+/N-2(+) ratio using hollow cathode discharge

作者：Shen H; Qin ZY; Zhang Y; Mi L; Xu P; Ying XT; Wang PN^*

来源：Vacuum, 2005, 77(2): 157-162.

DOI：10.1016/j.vacuum.2004.08.017

• nitrogen beam
• hollow cathode discharge
• TOFMS

Nitrogen beams with very high N+/N-2(+) ratio were generated using hollow-cathode discharge. The dependence of N+/N-2(+) ratio in the extracted beams on the discharge parameters was studied by mass spectroscopy. Very high N+ fractions (up to 90% and the maximum is about 98%) can be easily achieved without mass separation under typical operating conditions. The extracted beams with discharges using mixture precursors, such as N-2/NH3, or N-2/Ar were also investigated.

• 出版日期2005-1-17
• 单位复旦大学