Micro and nano machining by electro-physical and chemical processes

作者：Rajurkar K P^*; Levy G; Malshe A; Sundaram M M; McGeough J; Hu X; Resnick R; DeSilva A

来源：CIRP Annals, 2006, 55(2): 643-666.

DOI：10.1016/j.cirp.2006.10.002

• micromachining
• nano fabrication

The need for micro-features, components and products is rapidly increasing in diverse industries such as electronics, medical and aviation. Product miniaturization demands innovative manufacturing methods. Various existing macro-manufacturing processes are being modified to perform micro-scale manufacturing. Electro-physical and chemical micromachining processes play important role in this field due to their special material removal mechanisms. This paper reports the worldwide technical developments and state-of-the-art of electro-physical and chemical micromachining processes. Issues related to the supporting technologies such as standardization, metrology and equipment design are briefly assessed. Non-technological issues including environmental effects and education are also discussed.

• 出版日期2006