Nanofluidic chips for bio-molecules manipulation controlled by back electrodes enclosed with glass and polydimethylsiloxane

作者：Ba Dechun; Wang Dongyang; Liu Kun^*; Hao Ming; Du Guangyu; Ba Yaoshuai; Zhu Tong; Wu Zhiyong

来源：Journal of Computational and Theoretical Nanoscience, 2016, 13(4): 2237-2244.

DOI：10.1166/jctn.2016.4567

• Bio-chemical applications
• Bonding performance
• Control electrode
• Fabrication process
• Integrated chips
• Micro-and nano-fluidics
• Nanofluidic technologies
• Technological platform

Microfluidic and nanofluidic technology shows great prospect due to its unique benefits during process of biochemical applications. According to the structure and objective of nanofluidic chips of biology manipulation, we have developed an integrated micro-and nano-fluidics system with potential bio-manipulation capabilities like the detection, separation and enrichment of biological molecules at trace amount. The usage of PDMS and glass as hybrid bonding layers provides technological platforms for scientific as well as industrial applications. The control electrodes are patterned and deposited on the back of the chips with magnetron sputtering technique. With the perfect etching and bonding performances, the fabrication process of the chips provides a low-cost but feasible technique. The fluorescence microscopy results show that gained copper electrode could meet the needs of directional drive of DNA molecules. The depth depends on the etching time significantly and shows a liner dependent relevance.

• 出版日期2016
• 单位Northeastern university; 东北大学