Fabrication of fluorine-terminated diamond-like carbon thin film using a hyperthermal atomic fluorine beam

作者：Kanda Kazuhiro^*; Yamada Noriko; Yokota Kumiko; Tagawa Masahito; Niibe Masahito; Okada Makoto; Haruyama Yuichi; Matsui Shinji

来源：Diamond and Related Materials, 2011, 20(5-6): 703-706.

DOI：10.1016/j.diamond.2011.03.010

• Fluorine-terminated diamond-like carbon
• Hyperthermal atomic fluorine beam
• Wettability
• X-ray photoelectron spectroscopy
• Near-edge X-ray absorption fine structure

Surface modification of diamond-like carbon (DLC) film was performed using a hyperthermal atomic fluorine beam on the purpose of production of hydrophobic surface by maintaining the high hardness of DLC film. By the irradiation of atomic fluorine beam of a 1.0 x 10(20) atoms/cm(2), the contact angle of a water drop against the DLC surface increased from 73 degrees to 111 degrees. The formation of CF3, CF2 and CF bonding on the modified DLC surface was confirmed from the measurements of X-ray photoelectron spectra and near-edge X-ray absorption fine structure spectra. Irradiation of hyperthermal atomic fluorine beam was concluded to produce insulator fluorine-terminated DLC film, which has high F content on the surface. by the taking of the use of neutral atomic beam as a fluorine source.

• 出版日期2011-6