A contact inspection system for aspheric optical components

作者：Qiu, Gufeng; Cui, Xudong^*

来源：Optik, 2016, 127(19): 7572-7577.

DOI：10.1016/j.ijleo.2016.05.123

• Geometric optics
• Optical measurement techniques
• Optical inspection
• Aspheric

We construct a contact inspection system and realize low contact force and high precision measurements for aspheric optical components. The inspection and calibration principles, as well as the reliability of the system are thoroughly studied. Our investigations show that the system could provide low contact force measurement,(low than 0.7 mN), fast scanning speed (2 minis), and high accuracy (as low as 0.5 mu m), being a good option to the contact inspections of aspheric optical components.

• 出版日期2016
• 单位中国工程物理研究院激光聚变研究中心; 苏州大学; 中国工程物理研究院