A wearable pressure sensor based on ultraviolet/ozone microstructured carbon nanotube/polydimethylsiloxane arrays for electronic skins

作者：Yu, Guohui; Hu, Jingdong; Tan, Jianping; Gao, Yang^*; Lu, Yongfeng; Xuan, Fuzhen^*

来源：Nanotechnology, 2018, 29(11): 115502.

DOI：10.1088/1361-6528/aaa855

• wearable pressure sensor
• electronic skin
• human motion detection
• human health monitoring

Pressure sensors with high performance (e. g., a broad pressure sensing range, high sensitivities, rapid response/relaxation speeds, temperature-stable sensing), as well as a cost-effective and highly efficient fabrication method are highly desired for electronic skins. In this research, a high-performance pressure sensor based on microstructured carbon nanotube/polydimethylsiloxane arrays was fabricated using an ultra-violet/ozone (UV/O-3) microengineering technique. The UV/O-3 microengineering technique is controllable, costeffective, and highly efficient since it is conducted at room temperature in an ambient environment. The pressure sensor offers a broad pressure sensing range (7 Pa-50 kPa), a sensitivity of similar to -0.101 +/- 0.005 kPa(-1) (< 1 kPa), a fast response/relaxation speed of similar to 10 ms, a small dependence on temperature variation, and a good cycling stability (> 5000 cycles), which is attributed to the UV/O-3 engineered microstructures that amplify and transfer external applied forces and rapidly store/release the energy during the PDMS deformation. The sensors developed show the capability to detect external forces and monitor human health conditions, promising for the potential applications in electronic skin.

• 出版日期2018-3-16
• 单位华东理工大学