Mass and bond density measurements for PECVD a-SiCx:H thin films using Fourier transform-infrared spectroscopy (vol 357, pg 3602, 2011)

作者:King S W*; Bielefeld J; French M; Lanford W A
来源:Journal of Non-Crystalline Solids, 2013, 378: 291-291.
DOI:10.1016/j.jnoncrysol.2013.06.021
  • 出版日期2013-10-15

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