Development of Crystallographic Texture and In-Grain Misorientation in CVD-Produced Single and Polycrystalline Diamond

作者：Mohapatra Dipti Ranjan^*; Jain Lokendra; Rai Padmnabh; Hazra Kiran Shankar; Samajdar Indradev; Misra Devi Shanker

来源：Chemical Vapor Deposition, 2011, 17(4-6): 107-113.

DOI：10.1002/cvde.201006880

• Crystallographic texture
• Electron backscattered diffraction
• Misorientation
• Single crystal diamond

Extensive bulk and micro-texture measurements are used to characterize single and polycrystalline diamond thin films of different film thicknesses produced using CVD. With increasing film thickness, texturing improves and in-grain misorientation drops. This is observed for both single and polycrystalline films. Improved texturing in polycrystalline diamond can be rationalized from growth selection/advantage, however explanation(s) on the in-grain misorientation development and its relationship with texturing, if any, remain pending.

• 出版日期2011-6