Note: A real-time beam current density meter

作者:Liu, Junliang; Yu, Deyang*; Ruan, Fangfang; Xue, Yingli; Wang, Wei
来源:Review of Scientific Instruments, 2013, 84(3): 036107.
DOI:10.1063/1.4795400

摘要

We have developed a real-time beam current density meter for charged particle beams. It measures the mean current density by collimating a uniform and large diameter primary beam. The suppression of the secondary electrons and the deflection of the beam were simulated, and it was tested with a 105 keV Ar7+ ion beam.