摘要
We have developed a real-time beam current density meter for charged particle beams. It measures the mean current density by collimating a uniform and large diameter primary beam. The suppression of the secondary electrons and the deflection of the beam were simulated, and it was tested with a 105 keV Ar7+ ion beam.
- 出版日期2013-3
- 单位中国科学院近代物理研究所