A novel tribometer for the measurement of friction in MEMS

作者：Ku I S Y^*; Reddyhoff T; Choo J H; Holmes A S; Spikes H A

来源：Tribology International, 2010, 43(5-6): 1087-1090.

DOI：10.1016/j.triboint.2009.12.029

• Micro-electro-mechanical systems (MEMS)
• Lubrication
• Friction
• Tribometer
• Microtribology

A new tribometer has been developed to determine friction under conditions that are representative of MEMS (micro-electro-mechanical-systems). The tribometer consists of a rotating silicon disc, loaded against a stationary silicon disc. Friction and film thickness values are measured using laser displacement techniques. in this study, two different test set-ups were used: a flat on flat specimen geometry, and a moving flat against a structured surface, similar to that of a miniature thrust pad bearing. Using this tribometer, hydrodynamic tests have been carried out with the specimens fully submerged in hydrocarbon lubricants. Results suggest that friction increases with sliding speed and decreases with increasing applied normal load, which is in accordance with the hydrodynamic theory.

• 出版日期2010-6