A slack optimization unified model of regrouping and sequencing batches for β1 → β2 manufacturing system

作者：Jia, Wenyou^*; Chen, Hao; Liu, Li; Jiang, Zhibin; Li, You

来源：Proceedings of the Institution of Mechanical Engineers - Part B: Journal of Engineering Manufacture , 2019, 233(2): 665-672.

DOI：10.1177/0954405417738030

• Scheduling
• time windows
• batch processing machine
• multiple-phase scheduling strategy
• unified scheduling model

It is challenging to schedule batch processing machine in the semiconductor wafer fabrication system. Based on the rolling horizon scheme, the overall horizon is decomposed into many time windows. One time window corresponds to one sub-problem. Regarding each sub-problem, a multiple-phase scheduling strategy is performed, which consists of three phases: to update parameters, to sequence the regrouping batches, and to dispatch the priority-batch. A unified scheduling model of unifying beta(2) batch regrouping and sequencing is focused on in the beta(1) -> beta(2) type. In the model, the objective is a minimum total tardiness for sequencing the regrouping batches. To demonstrate the effectiveness of the developed approach, the experiments are implemented on a virtual semiconductor manufacturing test line. The results show that it can obtain satisfied solution.

• 出版日期2019-1
• 单位上海交通大学; 安徽工程大学