Fabricating of aspheric micro-lens array by excimer laser micromachining

作者：Chiu Chi Cheng^*; Lee Yung Chun

来源：Optics and Lasers in Engineering, 2011, 49(9-10): 1232-1237.

DOI：10.1016/j.optlaseng.2011.04.011

• Excimer laser
• Micromachining
• Aspheric micro-lens array

This work presents a unique method for fabricating aspheric micro-lens array based on a KrF 248 nm excimer laser micromachining with precise surface profile control. Based on a planetary contour scanning laser machining method along with a shading metal mask and sample movable stage, an array of micro-lenses with precisely controlled surface profiles can be fabricated. Each lens surface profile can be aspheric and pre-designed. Experiments have been carried out and the machining accuracy of each lens surface profile is examined. Good surface roughness and profile accuracy are observed.

• 出版日期2011-10