作者：Talkenberg Florian; Illhardt Stefan; Radnoczi Gyoergy Zoltan; Pecz Bela; Schmidl Gabriele; Schleusener Alexander; Dikhanbayev Kadyrjan; Mussabek Gauhar; Gudovskikh Alexander; Sivakov Vladimir
来源：JOURNAL OF VACUUM SCIENCE %26 TECHNOLOGY A, 2015, 33(4): 041101.
DOI：10.1116/1.4921726
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