MEMS based normally closed silicon microregulator for gas and water

作者：Pramanick B^*; Das S; Bhattacharyya T K

来源：Sensors and Actuators A: Physical , 2014, 205: 15-25.

DOI：10.1016/j.sna.2013.10.013

• MEMS
• Microregulator
• Piezoelectric actuation
• Bulk micromachining

This paper presents the design, fabrication and performance evaluation of a normally closed piezoelectrically actuated silicon microregulator. The microregulator is realized using two wafers process and is designed for the maximum operating pressure 5 bar and it is found to be leak proof (1 x 10(-4) sccm of helium gas). This paper also reports the development of precision fixturing, assembling and testing of the valve. One of the potential areas for application of microregulators is in satellite propulsion using ion thrusters. Ion thrusters require feed systems with very precise propellant gas flow rate and it makes microregulator a suitable candidate. Another application of the microregulator is liquid propellant flow control in micropropulsion. The water flow measurement of the same microregulator is discussed here. The hysteresis measurement of the silicon membrane using inductive probe and the cyclic test of the microregulator are also described here.

• 出版日期2014-1-1