A lithographic approach for quantum dot-photonic crystal nanocavity coupling in dilute nitrides

作者：Pettinari G^*; Gerardino A; Businaro L; Polimeni A; Capizzi M; Hopkinson M; Rubini S; Biccari F; Intonti F; Vinattieri A; Gurioli M; Felici M

来源：Microelectronic Engineering, 2017, 174: 16-19.

DOI：10.1016/j.mee.2016.12.003

• Site-controlled QDs
• Photonic crystal structures
• Dilute nitrides
• Hydrogen in semiconductors

We report on a novel lithographic approach for the fabrication of integrated quantum dot (QD)-photonic crystal (PhC) nanocavity systems. We exploit unique hydrogen's ability to tailor the band gap energy of dilute nitride semiconductors to fabricate isolated site-controlled QDs via a spatially selective hydrogenation at the nanometer-scale. A deterministic integration of the realized site-controlled QDs with PhC nanocavities is provided by the inherent realignment precision (similar to 20 nm) of the electron beam lithography system used for the fabrication of both QDs and PhC cavities. A detailed description of the fabrication steps leading to the realization of integrated QD-PhC cavity systems is provided, together with the experimental evidence of a weak coupling effect between the single-photon emitter and the PhC cavity.

• 出版日期2017-4-25