科研之友
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摘要
A review of nanoelectromechanical systems (NEMS) considering the origin, potential applications and main challenges is presented. The NEMS possess fascinating attributes such as their nanoscale size, ultra-low power consumption, high quality factor, operability at high frequencies, high sensitivity and resolution. Thanks to these attributes, NEMS can be adapted for many technological applications such as ultra-fast sensors, actuators, components for signal processing, nanomemories and nanorobots. However, the NEMS have important technological challenges to achieve their optimization, a reproducible and high-resolution nanofabrication, high quality factors, and integration with electronic circuits.
- 出版日期2010-3
