Dynamic actuation methods for capacitive MEMS shunt switches

作者：Khater M E^*; Vummidi K; Abdel Rahman E M; Nayfeh A H; Raman S

来源：Journal of Micromechanics and Microengineering, 2011, 21(3): 035009.

DOI：10.1088/0960-1317/21/3/035009

We develop dynamic actuation methods for capacitive MEMS shunt switches. We show that the dynamic actuation voltage is significantly less than the static actuation voltage and demonstrate 60% reduction in the actuation voltage. We also show that this reduction in the actuation voltage depends on the specific dynamic switching technique adopted. For a given operating condition, the minimum realizable switching time is that obtained using static switching. However, we developed a dynamic switching method that yields comparable switching time to that minimum. We also found that squeeze-film damping is the dominant damping mechanism for a shunt switch with a relatively slender bridge (aspect ratio of 11: 1).

• 出版日期2011-3
• 单位美国弗吉尼亚理工大学(Virginia Tech)