摘要

The tilt between the indenter and the sample surface will affect the measuring results and the accuracy of nanoindentation and scratches. In this paper, the potential factors leading to the tilt are firstly discussed. Then, based on the Cartesian coordinate system at the tip of the triangular pyramid indenter established by Kashani and Madhavan, a theoretical approach is proposed to measure the tilt angle eta and the rotation angle xi of the surface normal (n) over cap using the residual indent morphology. In order to reduce the input parameters for solving the equations and also make the equations dimensionless, two coefficients m and n are defined. One practical application is given to verify the feasibility of the theoretical approach. The theoretical approach is simplified and unified by analyzing the calculation results. The presented theoretical approach can be used to measure the tilt between the indenter and the sample surface indirectly, which is the premise for the adjustment of indentation instruments or the practical correction of the tilt.