UV embossing of sub-micrometer patterns on biocompatible polymeric films using a focused ion beam fabricated TiN mold

作者:Gao JX; Chan Park MB*; Xie DZ; Yan YH; Zhou WX; Ngoi BKA; Yue CY
来源:Chemistry of Materials, 2004, 16(6): 956-958.
DOI:10.1021/cm0342849
  • 出版日期2004-3-23
  • 单位南阳理工学院