Application of AES line shape analysis for the identification of interface species during the metallization of diamond particles

作者：Zhu, YF^*; Yao, WQ; Zheng, B; Cao, LL

来源：Surface and Interface Analysis, 1999, 28(1): 254-257.

DOI：10.1002/(SICI)1096-9918(199908)28:1<254::AID-SIA588>3.0.CO;2-E

• metallization
• diamond
• interface
• AES
• Auger line shape

Auger electron spectroscopy (AES) has been used to investigate the interface diffusion and chemical reaction on the interface of a metal/diamond sample during the metallization of diamond particles. The results indicated that a Ti layer reacted with the diamond particles to form a TiC surface layer after the sample was annealed at 600 degrees C for 4 h, The diffusion process of carbon atoms from diamond substrate into the Ti layer was the key step for the formation of a TiC surface layer. A Cr metallization layer reacted with the diamond particles to form CrC and Cr2C3 surface layers. The formation of the carbide layer was governed by the interface reaction. The CrC and Cr2C3 species cannot be distinguished using Cr LMM line shape but it can be distinguished using Cr MW line shape. The AES line shape analysis is useful for studying the interface reaction and identifying the interface species.

• 出版日期1999-8
• 单位清华大学