Upper and lower bounds for the pull-in parameters of a micro- or nanocantilever on a flexible support

作者：Radi Enrico^*; Bianchi Giovanni; di Ruvo Lorenzo

来源：International Journal of Non-Linear Mechanics, 2017, 92: 176-186.

DOI：10.1016/j.ijnonlinmec.2017.03.011

• Pull-in instability
• Electrostatic actuation
• MEMS
• NEMS
• Nanocantilever
• Intermolecular surface attractions
• Flexible support

An analytical method is proposed to accurately estimate the pull-in parameters of a micro- or nanocantilever beam elastically constrained by a rotational spring at one end. The system is actuated by electrostatic force and subject to Casimir or van der Waals forces according to the beam size. The deflection of the beam is described by a fourth-order nonlinear boundary value problem, or equivalently in terms of a nonlinear integral equation. New a priori analytical estimates on the solution from both sides are first derived and then lower and upper bounds for the pull-in parameters are obtained, with no need of solving the nonlinear boundary value problem. The lower and upper bounds turn out to be very close each other and in excellent agreement with the numerical results provided by the shooting method. The approach also provides accurate predictions for the pull-in parameters of a freestanding nanoactuator.

• 出版日期2017-6