Analysis and Simulation for Properties and Performance of Carbon-Nitrogen-Ceramic Multilayer Coatings

作者：Jean Ming Der^*; Chien Tzu Hsuan; Chang Huan; Fang Jium

来源：Journal of Computational and Theoretical Nanoscience, 2010, 7(8): 1447-1456.

DOI：10.1166/jctn.2010.1502

• Unbalanced Magnetrons (UBM)
• Carbon-Nitrogen-Ceramic Multilayer Coating
• X-Ray Photoelectron Spectroscopy (XPS)
• Adhesive Behavior
• Network-Based Fuzzy Systems

A neural-based fuzzy logic system was used to model and characterize adhesive behavior of the carbon-nitrogen-ceramic multilayer coating. The carbon-nitrogen ceramic multilayer coatings were prepared by an unbalanced magnetron (UBM) sputtering. Two kinds of carbon-nitrogen-ceramic multilayer coatings with Zr/ZrC/NC and Zr/ZrC/NZrC were adopted. An orthogonal array for reducing the number of required experiments is introduced. The critical load of the scratches to failure and the adhesive properties of a carbon-nitrogen-ceramic coating deposited on stainless steel substrate were carried out. A fuzzy logic system with neural networks in the UBM sputterings was made. The experimental results show the Zr/ZrC/NC films are found to have higher adhesive force, lower ratio of sp(3) to sp(2) structure and a somewhat lower coefficient of friction and tangential force than Zr/ZrC/NZrC films. A reliable multilayer process significantly improves the characteristics and structural features of carbon-nitrogen-ceramic coatings. Superior adhesive properties of the carbon-nitrogen-ceramic multilayer films in the UBM sputterings could be obtained. Further, the accurate modeling of a fuzzy logic system with neural networks can effectively estimate adhesion of the carbon-nitrogen-ceramic multilayer coatings in the UBM sputtering. It was experimentally confirmed adaptive fuzzy logic system predictors agree with the experiments.

• 出版日期2010-8