Nanopore processing in dielectric materials and dielectric template-assisted nanoarray synthesis: Using pulsed bias to enhance process throughput and precision

作者：Wu, Xiaochen; Zhong, Xiaoxia^*; Ostrikov, Kostya

来源：Applied Physics Letters, 2008, 92(22): 223104.

DOI：10.1063/1.2928219

• Dynamic charges
• Energetic ion
• Ion deposition
• Nanoporous templates
• Pore openings
• Porous dielectrics
• Process throughput
• Substrate surface

An effective technique to improve the precision and throughput of energetic ion condensation through dielectric nanoporous templates and reduce nanopore clogging by using finely tuned pulsed bias is proposed. Multiscale numerical simulations of ion deposition show the possibility of controlling the dynamic charge balance on the upper template's surface to minimize ion deposition on nanopore sidewalls and to deposit ions selectively on the substrate surface in contact with the pore opening. In this way, the shapes of nanodots in template-assisted nanoarray fabrication can be effectively controlled. The results are applicable to various processes involving porous dielectric nanomaterials and dense nanoarrays.

• 出版日期2008-6-2
• 单位上海交通大学; CSIRO