Method to obtain nonuniformity information from field emission behavior

作者：Dall'Agnol Fernando F^*; de Paulo Alexandre C; Paredez Pablo; den Engelsen Daniel; Santos Thebano E A; Mammana Victor P

来源：Journal of Vacuum Science and Technology B, 2010, 28(3): 441-449.

DOI：10.1116/1.3327928

• cathodes
• electron field emission
• vacuum microelectronics

This article describes the characterization of field emission from a planar cathode to a spherical anode with the approach curve method (ACM). In such a diode configuration the electric field strength at the cathode surface is nonuniform. This nonuniformity gives an extra degree of freedom and it allows the interpretation of the current-voltage and voltage-distance (Vxd) curves in terms of nonuniformity. The authors apply the ACM to Cu emitters to explain the nonlinearity of the Vxd curve in ACM measurements. This analysis provides a good insight into field emission phenomena, supporting a method for nonuniformity characterization based on field emission behavior.

• 出版日期2010-5