摘要

The nanotribological performance for three groups of metal-ZrN, including Inconel-ZrN, Cr-ZrN, Nb-ZrN, and polycrystalline ZrN thin films has been investigated and results were correlated with surface energy evaluations. Metal-ZrN and ZrN thin films were deposited using direct current (DC) unbalanced magnetron sputtering and their elemental composition was investigated using X-ray photoelectron spectroscopy (XPS). Both nanomechanical and nanotribological properties were evaluated using a triboscope interfaced with an atomic force microscope (AFM) and the surface energies were calculated from the contact angle measurements. The present research reports for the first time on the nanowear behavior, surface roughness, and friction coefficients correlated with surface energies of metal-ZrN and ZrN thin films. All metal-ZrN thin films showed improved nanotribological performance compared to the polycrystalline ZrN. Results indicate that several of the Inconel-ZrN thin film compositions have both superior nanotribological behavior and good wettability and thus have high potential use for wear resistant applications.

  • 出版日期2010