Analytical Modeling of CMUTs in Coupled Electro-Mechano-Acoustic Domains Using Plate Vibration Theory

作者：You Wei^*; Cretu Edmond; Rohling Robert

来源：IEEE Sensors Journal, 2011, 11(9): 2159-2168.

DOI：10.1109/JSEN.2011.2113373

• Analytical modeling
• capacitive micromachined ultrasonic transducers (CMUTs)
• control
• electro-mechano-acoustic coupling
• finite-element modeling (FEM)
• microelectromechanical systems (MEMS)

This paper proposes an analytical capacitive micromachined ultrasonic transducer (CMUT) model that couples three physical domains using plate vibration and radiation theories. The model accounts for the spatial distribution of the normal deflection over the CMUT cell membrane. A mode superposition expression is used to capture the complicated flexural-plate-like movement. We compare the results of analytical calculations using the proposed plate model with those of finite-element modeling, together with the analytical results of the piston-like models. This approach shows promise for more detailed and convenient physical modeling of CMUTs, which could lead to new ways of designing and controlling them.

• 出版日期2011-9