Microelectrofluidic bench using UV-curable rigid polymer fabricated by rapid and low-temperature process

作者：Doh Il; Youn Sechan; Jin Young Hyun; Cho Young Ho^*

来源：Current Applied Physics, 2012, 12(6): 1596-1599.

DOI：10.1016/j.cap.2012.05.026

• Microelectrofluidic bench
• UV-curable polymer
• Rapid and low-temperature process

We present a rapid and low-temperature polymer fabrication method based on the direct patterning by UV light. Compared to the conventional polymer micromolding method for polydimethylsiloxane (PDMS) and cyclic olefin copolymers (COC), the present method has advantages of rapid fabrication in low-temperature environment. We used an AEO3000, UV-curable low-stress hyper-branched polymer (HBP), as a polymer material. The AEO3000 layer was selectively exposed to UV light by a photomask at room temperature for 3 min. Using the present method, we designed the rigid substrate for the microelectrofluidic bench. The measured electrical and fluidic interconnection characteristics in the bench were 0.75 +/- 0.44 Omega and 8.3 kPa (at the flow rate of 100 mu l/min), respectively. Both electric and fluidic characteristics were equivalent or lower than the sum of individual devices. We also successfully verified the bio-sample analysis through the interconnected devices on the microelectrofluidic bench using yeast cell samples. The proposed method offers fast and bio-compatible process applicable to biomedical micro total analysis systems.

• 出版日期2012-11