Depth analysis on oxidation of Al/Si(111) thin film by X-ray photoelectron spectroscopy using synchrotron radiation (vol 54, 055202, 2015)

作者:Imamura Motoyasu*; Kobayashi Eiichi; Sasaki Masahiro
来源:Japanese Journal of Applied Physics, 2016, 55(10): 109201.
DOI:10.7567/JJAP.55.109201