Scanning interferometric method for measuring group delay of dispersive mirrors

作者：Li Chengshuai; Shen Weidong^*; Zhang Yueguang; Fan Huanhuan; Liu Xu

来源：Chinese Optics Letters, 2013, 11(SUPPL.1).

DOI：10.3788/COL201311.S10302

• Direct extraction
• Group delay dispersion
• Interferometric methods
• Material characterizations
• Thin-film structure
• Time-domain algorithm
• Wavelet denoising algorithm
• White-light interferometer

A scanning white-light interferometer is built for precisely measuring phase properties of dispersive multi- layer thin film structure with the aid of the commercial spectrometer. Combining seeking optimal function for interferogram maximas with wavelet denoising algorithm, a novel time-domain algorithm is presented which enables the direct extraction of group delay and thus obtains a remarkable decrease of noise level in group delay and group delay dispersion. The apparatus shows reasonable potential for multilayer measurement, material characterization, displacement measurement as well as profilometry.

• 出版日期2013
• 单位浙江大学