Development of novel flexible black silicon

作者:Mei Hao; Wang Chao; Yao Jimmy; Chang Yun Ching; Cheng Jiping; Zhu Yong; Yin Shizhuo*; Luo Claire
来源:Optics Communications, 2011, 284(4): 1072-1075.
DOI:10.1016/j.optcom.2010.10.024

摘要

We report a new type of black silicon flexible black silicon A silicon on-insulator (SOI) wafer is irradiated by automatically scanning a femtosecond laser and then split by etching out the SOI silica middle layer Large-area uniform micro spikes on the surface of a very thin flexible silicon layer are obtained The black silicon shows good flexibility and optical properties The absorption spectrum of the flexible black silicon is as high as 97% in the visible and insensitive to the change of the incident angle of the light which makes It a potential good candidate as an absorber for the solar-thermo generator Published by Elsevier B V