Novel localized vibration-assisted magnetic abrasive polishing method using loose abrasives for V-groove and Fresnel optics finishing

作者：Guo, Jiang^*; Jong, Henry Jia Hua; Kang, Renke; Guo, Dongming

来源：Optics Express, 2018, 26(9): 11608-11619.

DOI：10.1364/OE.26.011608

• SURFACE
• TOOL
• SILICON
• LENSES
• MICROSTRUCTURES
• OPTIMIZATION
• MANUFACTURE
• FABRICATION
• GERMANIUM
• FLUID

This paper presents a new localized vibration-assisted magnetic abrasive polishing (VAMAP) method using loose abrasives for V-groove and Fresnel optics finishing. The purpose is to improve the surface quality while maintaining the form of the microfeatures. This method allows abrasives to access the corners of the microfeatures and remove materials locally and uniformly by effectively controlling the magnetic field and vibration which overcomes the limitations of previous research. By using loose abrasives, the method achieved nanometer level surface roughness and damage-free surface while maintaining the form of the microfeatures. The results show that the surface roughness was reduced to about 7 nm Ra from the initial value of over 10 nm Ra while the microfeatures of V-groove and Fresnel optics were well maintained. At the same time, the surface defects including voids, scratches as well as tool marks were clearly removed.

• 出版日期2018-4-30
• 单位大连理工大学