Design and characterization of a microelectromechanical system electro-thermal linear motor with interlock mechanism for micro manipulators

作者：Hu, Tengjiang; Zhao, Yulong^*; Li, Xiuyuan; Zhao, You; Bai, Yingwei

来源：Review of Scientific Instruments, 2016, 87(3): 035001.

DOI：10.1063/1.4943266

• THERMAL MICROACTUATORS
• LARGE-FORCE
• ACTUATORS
• PERFORMANCE
• DEFLECTION
• MODEL

The design, fabrication, and testing of a novel electro-thermal linear motor for micro manipulators is presented in this paper. The V-shape electro-thermal actuator arrays, micro lever, micro spring, and slider are introduced. In moving operation, the linear motor can move nearly 1 mm displacement with 100 mu m each step while keeping the applied voltage as low as 17 V. In holding operation, the motor can stay in one particular position without consuming energy and no creep deformation is found. Actuation force of 12.7 mN indicates the high force generation capability of the device. Experiments of lifetime show that the device can wear over two million cycles of operation. A silicon-on-insulator wafer is introduced to fabricate a high aspect ratio structure and the chip size is 8.5 mm x 8.5 mm x 0.5 mm.

• 出版日期2016-3
• 单位西安交通大学; 中国兵器工业第二一三研究所