Novel Approach to Control Diameter of Self-Rolled Magnetic Microtubes by Anodizing Ti Layer

作者:Min Seonggi; Gaffney John; Eskandari Rahmatollah; Tripathy Jagnyaseni; Lim Jin Hee; Wiley John B; Malkinski Leszek*
来源:IEEE Magnetics Letters, 2012, 3: 4000304.
DOI:10.1109/LMAG.2012.2213074

摘要

Stress engineering in multilayered thin-film patterns is the key to control the diameter of self-rolled magnetic structures. Arrays of magnetic microtubes were fabricated via a deterministic release of rectangular thin-film patterns of Ti(20 nm)/Ni(30 nm)/Au(2 nm) and Ti(20 nm)/GaFe(40 nm)/Au(15 nm) from a sacrificial underlayer of Cu. It is demonstrated that the expansion of the anodized Ti layer leads to a reduction of the diameter of the tubes by almost 50%. The changes of shape of the magnetic patterns from flat to tubular and further reduction of the tube diameter due to anodizing were accompanied by changes of their magnetic characteristics.

  • 出版日期2012