Fast microstructuring of silica glasses surface by NIR laser radiation

作者：Kostyuk G K; Sergeev M M; Zakoldaev R A^*; Yakovlev E B

来源：Optics and Lasers in Engineering, 2015, 68: 16-24.

DOI：10.1016/j.optlaseng.2014.12.004

• Laser micromachining
• MOEs
• Fused silica
• LIBBH

The glass surface microstructuring technology using laser radiation with NIR wavelength (lambda=1.064 pm) was revealed in this work. Glass plates were placed on the cellular graphite surface. Focused laser radiation passed through the glass plate and interacted with cellular graphite. The radiation heated the graphite surface and thus the high temperature influenced the back side of the glass plate. After consecutive laser scans, having certain periods and interruptions of laser radiation, the microstructures with depth similar to 0.5 mu m were formed. Besides, in this work we suggested the method to calculate optical characteristics of formed elements. It was experimentally shown that these microstructures could be used to form phase diffraction gratings (PDGs) and random phase plates (RPPs). We experimentally demonstrated the possibility of these elements being used as RPPs which are suitable for multimode laser radiation homogenization and as PDGs which are suitable for laser simultaneous processing of metal films.

• 出版日期2015-5