A second harmonic based resonance characterization method for MEMS electrostatic resonators

作者：Aydin Eren^*; Gokce Furkan; Kangul Mustafa; Zorlu Ozge; Kulah Haluk

来源：Sensors and Actuators A: Physical , 2018, 274: 220-230.

DOI：10.1016/j.sna.2018.03.013

• MEMS
• Resonator
• Resonance characterization
• Feedthrough current elimination
• Quality-factor enhancement

This paper presents a novel read-out approach both for eliminating parasitic feedthrough current and for enhancing the quality-factor (Q) of the resonating system at the same time. A new resonance characterization method based on sensing second harmonic component of the resonators was developed. Utilizing this method, the feedthrough current was eliminated and the signal-to-background ratio was increased from 0.9 dB to 35.5 dB. Furthermore, the Q of the resonating system was improved by 65% experimentally. It was shown that this method is suitable for eliminating both capacitive and resistive feedthrough current without using complex MEMS designs and interface electronics.

• 出版日期2018-5-1