科研之友
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摘要
A magnetic actuator consisting of a silicon oxide microcantilever and a silicon oxide plate deposited on ferromagnetic multilayer thin films is fabricated using electron beam lithography and electron beam evaporation, and placed in various magnetic fields to observe its flexure. The magnetic actuator is bent by magnetic torque produced by ferromagnetic multilayer thin films under an external magnetic field owing to the fabrication of a highly sensitive microcantilever and the design of elliptic ferromagnetic thin films with high magnetic shape anisotropy. The magnetic actuator is placed in four kinds of magnetic field directions to investigate the diversity of deflections; the angles between the easy axis of the ferromagnetic multilayer thin films and the direction of the external magnetic field are 90 degrees, 70 degrees, 45 degrees and 20 degrees.
- 出版日期2012-3
- 单位清华大学
