Aerosol-Assisted CVD of SnO2 Thin Films for Gas-Sensor Applications

作者：Stoycheva Toni T^*; Vallejos Stella; Pavelko Roman G; Popov Viktor S; Sevastyanov Vladimir G; Correig Xavier

来源：Chemical Vapor Deposition, 2011, 17(7-9): 247-252.

DOI：10.1002/cvde.201106917

• AACVD
• Gas sensors
• Metal oxide
• SnO2

In this article is a report of SnO2 deposition by aerosol-assisted (AA)CVD from tin complexes, [Sn(18-Cr-6)Cl-4] and [Sn(H2O)(2)Cl-4](18-Cr-6). The structure and properties of the precursors, used to synthesize SnO2 layers by AACVD for the first time, are characterized with the help of X-ray diffraction (XRD), infrared (IR), and thermogravimetric analysis (TGA). Each complex is deposited by AACVD at 250, 400, and 500 degrees C in a flow of N-2. The resulting films are studied by XRD and atomic force microscopy (AFM). Gas-sensing properties of the deposited layers are tested to 10 ppm NO2 in air. The maximum sensor response to the analyte is measured at 300 degrees C.

• 出版日期2011-9