摘要

This paper reports the fabrication and characterization of a sensor-chip based on a 2x2 microchamber array produced on silicon by anisotropic etching. The chip consists of a glucose sensor, a glutamate sensor, a galactose sensor and a potassium ion-selective-electrode. The structure of the microchamber-array has improved membrane adhesion and mechanical stability and can offer the place-selective immobilization of the, enzymes. A chitosan membrane is used not only to immobilize the enzyme on the working electrode but also to prevent the penetration of interferents such as uric and ascorbic acids. The fabricated chips have shown attractive performances such as high sensitivity and good stability.