A New Hybrid Micromachined Contactless Suspension With Linear and Angular Positioning and Adjustable Dynamics

作者：Poletkin Kirill; Lu Zhiqiu; Wallrabe Ulrike; Badilita Vlad

来源：Journal of Microelectromechanical Systems, 2015, 24(5): 1248-1250.

DOI：10.1109/JMEMS.2015.2469211

• Levitation
• contactless suspension
• frictionless micro-bearings
• inductive suspension
• electrostatic suspension
• bistable
• 3D-micro-coils

In this letter, we present a new hybrid micromachined contactless suspension based on combining electromagnetic inductive and electrostatic actuation. In addition, the stiffness components are dynamically adjusted during the operation phase using a series of electrodes integrated in the contactless suspension structure. We experimentally demonstrate vertical linear positioning of a disk-shaped proof mass in a range from 30 to 200 mu m, controlled tilting about two orthogonal axes in the horizontal plane ranges from +/- 1 degrees to +/- 4 degrees, as well as controlled oscillation about the vertical axis with an angular displacement of 37 degrees at a frequency of 1.5 Hz. In order to demonstrate dynamical adjustment of the stiffness, we experimentally show that the angular component of stiffness is increased by a factor of two at a levitation height of 100 mu m. Therefore, the suspension dynamics can be changed and adapted to particular applications or to variations in operational environments. Moreover, we demonstrate that this device can operate as a bistable micro-actuator. [2015-0150]

• 出版日期2015-10