摘要

As a key part of the articulated arm coordinate measuring machine, the probe can determine the measurement accuracy. Therefore, the error source and influencing factors of the equivalent diameter of the probe are studied. First, the influence of the primary factor of the measuring force on the equivalent diameter of the probe is studied by analyzing the influence degree of its error source. Second, a mathematical model of the relationship between the equivalent diameter and the measuring force of the articulated arm coordinate measuring machine is built to compensate for the equivalent diameter error caused by the measuring force by the simulated annealing method. To illustrate the application advantage of our proposed study, a simple force-measuring device is designed based on this model. The experimental result shows that the maximum error reduction is approximately 43 mu m, while the average error reduction ranges from 33 to 4.0 mu m, which represents an 87.7% improvement. Overall, our proposed method can effectively compensate for the equivalent diameter error caused by the measuring force. This method can improve the accuracy of the articulated arm coordinate measuring machines on both calibration and measurement.