Non-lithographic optical applications, systems and materials in the deep UV

作者：Richardson K^*; Petit L

来源：Glass Science and Technology, 2005, 78: 19-26.

Next generation materials applications are aiming to create and evaluate smaller-sized features. Such engineering requires optical probes capable of quantifying such features, which will need to operate at shorter wavelengths employing novel design geometries. These systems will require illumination sources, optical components and detectors compatible with transmission and reflective requirements for this energy regime. This paper reviews current applications and systems focused on the deep UV region of the optical spectra and those materials which are transparent and reflective for these non-lithographic applications.

• 出版日期2005